Drift Rejection Differential Frontend for Single Plate Capacitive Sensors

Fully-Differential Capacitive Sensors

Although sensors used in the majority of high-performance seismometers are capacitive, the performance of present commercial instruments is less than what it could be--due to the choice of less-than-optimal electrode configurations. The detector in commercial instruments has only one-half the symmetry of the patented symmetric differential capacitive (SDC) transducer, also known as 'fully diffe...

Differential read-out circuit for capacitive sensors

Charge-transfer-based Signal Interface for Differential Capacitive Sensors

 We propose a circuit to directly connect a differential capacitive sensor to a microcontroller unit (MCU), which is based on the charge-transfer method and does not need any calibration component. The performance has been tested by emulating the differential capacitive sensor with discrete components. The major uncertainty sources are residual stray capacitances. The maximal deviation obtaine...

Design of Cmos Readout Frontend Circuit for Mems Capacitive Microphones

This paper deals with a frontend part of the readout circuit developed as an integrated circuit that after bonding together with a MEMS capacitive microphone (MCM) chip will be used in a noise dosimeter applicable in very noisy and harsh environment, e.g. mine. Therefore, the main attention has been paid to the high dynamic range, low offset and low noise of the developed readout interface as w...

Measurements of Material Properties Using Differential Capacitive Strain Sensors

This paper describes a laterally deflecting micromachined device that offers high sensitivity and wide dynamic range to electronically monitor the thermal expansion coefficient, tensile and compressive residual strain and Young’s modulus of microstructural materials, as well as the temperature dependence of these properties. The device uses sidewall capacitance between interdigitated tines to s...